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Plasma Etch and Strip in Microtechnology workshop (PESM 2023)
19.06.2023 - 20.06.2023
Grenoble, France
This workshop is the 13th in a series devoted to plasma etch and strip processes for micro, nano and bio-technologies.
Topics:
Topic 1: Plasma etching processes for III-V and III-N semiconductor materials
Topic 2: Plasma etching processes for advanced memory technologies
Topic 3: Plasma processes for more than Moore applications
Topic 4: Emerging plasma etching concept and technology fundamentals
Topic 5: Plasma diagnostics and simulation
Key dates
Opening for submission : January, 9th 2023
Abstracts are due: February, 24th 2023