Министерство образования Республики Беларусь Nanomeeting - 2011 Микроэлектроника


Министерство образования Республики Беларусь Nanomeeting - internatiol conference Национальная академия наук Беларуси Государственный комитет по науке и технологиям ВАК - Высшая аттестационная комиссия

Plasma Etch and Strip in Microtechnology workshop (PESM 2023)

19.06.2023 - 20.06.2023
Grenoble, France
This workshop is the 13th in a series devoted to plasma etch and strip processes for micro, nano and bio-technologies.
Topic 1: Plasma etching processes for III-V and III-N semiconductor materials 
Topic 2: Plasma etching processes for advanced memory technologies 
Topic 3: Plasma processes for more than Moore applications 
Topic 4: Emerging plasma etching concept and technology fundamentals
Topic 5: Plasma diagnostics and simulation
Key dates
Opening for submission : January, 9th 2023
Abstracts are due: February, 24th 2023

Made in nanoelectronics Center and New Materials, SRD BSUIR, commissioned by  Ministry of Education of the Republic of Belarus.