The International Conference “Micro- and Nanoelectronics – 2018” (ICMNE-2018) with the Extended Session "Quantum Informatics" (QI-2018)
01.10.2018 - 05.10.2018
Zvenigorod, Moscow Region, Russia.
Organizers and Sponsors:
Institute of Physics and Technology of the Russian Academy of Sciences, Moscow, Russia
JSC Molecular Electronics Research Institute, Zelenograd, Russia
Russian Foundation for Basic Research, Moscow, Russia
Russian Academy of Sciences, Division of Nano- and Information Technologies, Russia
SPIE – The International Society for Optical Engineering
Rzhanov Institute of Semiconductor Physics of the Russian Academy of Sciences (the Siberian Branch), Novosibirsk, Russia
M.V. Lomonosov Moscow State University, Moscow, Russia
P.G. Demidov Yaroslavl State University, Yaroslavl, Russia
TechoInfo, Ltd., Wembley, UK
NIX Company, Moscow, Russia
Scope:
Physics of micro- and nanodevices:
Scaling challenges and opportunities for nanodevices
Nanoscale transistors: CMOS FET, TFET, SET, molecular transistors, molecular switches, etc.
Integrated memory devices, DRAM, ReRAM, FeRAM
Devices with 1D and 2D channels
Carbon micro- and nanoelectronics
Solid state devices for THz generation and detection
Magnetic micro- and nanostructures, spintronic devices
Superconducting micro- and nanodevices and structures
Devices for optoelectronics, photonics
Sensors, micro- and nanoelectromechanical systems (MEMS, NEMS, BioMEMS)
Device simulation and modeling
Technology and characterization of materials for micro- and nanoelectronics:
Si, SOI, SiGe, A3B5, A2B6
High-k dielectrics, low-k dielectrics
Metal films for device structures
1D and 2D materials
Magnetic materials, nanomagnetics
Materials for optoelectronics and photovoltaic, metamaterials
Technologies and advanced equipment for micro- and nanoelectronics:
Lithography: immersion, EUV, electron and ion lithography, nanoimprint
Front-end of line (FEOL) processes in ULSI's technology
Back-end of line (BEOL) processes in ULSI's technology
3D integration technologies
Technologies for 2D materials (graphene, MoS2, WS2, etc.)
Technologies for 1D structures (nanowires, nanotubes)
Technologies for MEMS and NEMS
Technologies for superconducting devices
Metrology:
In situ processes monitoring and control (end-point detection, process smart sensors)
Inspections, metrology, and characterization of micro- and nanostructures
Quantum informatics:
Quantum computers: theory and experiments
Quantum measurements
Quantum algorithms
Quantum communications
Language: English.