Conference on electron beam technology "CEBT-19"
30.09.2019 - 03.10.2019
Chernogolovka, Russian Federation
Organized by Institute of Microelectronics Technology and High Purity Materials RAS (IMT RAS) Chernogolovka and "Mikron" Сompany Moscow, Zelenograd
List of sections:
Section 1. Characterization of semiconductor materials and structures.
Section 2. Characterization of materials and structures byTEM methods.
Section 3. Characterization of materials by SEM methods.
Section 4. Scanning probe microscopy, probe nanolithography and spectroscopy.
Section 5. Electronic and ion lithography.
Section 6. Electron - beam technologies: the creation of micro - and nanostructures,
3D printing, electron beam welding, electron beam melting.
Section 7. New materials for microelectronics.
Section 8. Characterization of materials and structures by X-ray microscopy.
Registration starts on March , 2019.
The deadline for the acceptance of abstracts is May , 2019.