THE PLASMA ETCH AND STRIP IN MICROTECHNOLOGY WORKSHOP
08.06.2026 - 09.06.2026
Grenoble, France
PESM 2026 is the 16th event in a series devoted to plasma etch and strip processes for micro-, nano- and bio-technologies.
Topics
Topic 1: Plasma etching processes for advanced CMOS, memory & quantum technologies
Topic 2: Plasma processes for more than Moore applications
Topic 3: Emerging plasma etching concept and technology
Topic 4: Plasma diagnostic, simulation and machine learning
Topic 5: Sustainable processes in micro & nanotechnology
Topic 6: Dry stripping and cleaning processes
Abstracts are due: February 28th 2026